Analytical modelling of a tri-axial flexible capacitive tactile sensing array Online publication date: Sat, 29-Jun-2019
by Jian-Ping Yu; Xin Li; Yu-Liang Zhang
International Journal of Nanomanufacturing (IJNM), Vol. 15, No. 3, 2019
Abstract: In this paper, the analytical modelling of a tri-axial flexible capacitive tactile sensing array is proposed. A unit sensing element consists of a sensing electrode layer, an insulation layer, a common electrode layer and a surface layer. The sensing electrode layer is of flexible printed circuit board (FPCB) based structure, on which, four sensing electrodes and fragile interconnects for signal sampling are implemented. While the common electrode layer is patterned on polydimethlysiloxane (PDMS) based structures, on which only a common electrode is implemented. This design is on purpose of enhancing the device flexible rigidity. Four sensing electrodes and a common electrode constitute four capacitors in a unit sensing element, when the four capacitors are arranged in a square form, the measured contact force will be easily decomposed into its normal and shear components. The estimated sensitivities of a unit sensor are 0.43 and 0.17%/mN for the x-y and z-axes, respectively.
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