Affected layer evaluation of ultraprecise machined surface using magnetic force microscopy Online publication date: Tue, 06-Mar-2007
by Yoshio Ichida, Yoshitaka Morimoto, Ryunosuke Sato
International Journal of Machining and Machinability of Materials (IJMMM), Vol. 2, No. 1, 2007
Abstract: This paper describes a new method for evaluating the affected layer of ultraprecise machined surface based on the magnetic domain analysis using a Magnetic Force Microscope (MFM). The fine maze magnetic domain pattern is observed on the ultraprecise lapped ferrite (111) plane. The maze domain pattern becomes coarser by increasing the etched depth of surface affected layer. The area percentage of magnetic domain pattern in the whole machined surface decreases with increasing the etched depth of the affected layer and the magnetic domain pattern disappears when the etched depth exceeds about 1 µm. This critical value in the etched depth is almost equal to the surface affected layer depth, evaluated from electron diffraction analysis. These results show that the magnetic domain imaging method using MFM becomes a useful technique of evaluating the surface affected layer of various magnetic materials.
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