Distortion and correction on galvanometer scanning radar Online publication date: Mon, 10-Apr-2023
by Xianyu Meng; Ya'nan Gao; Bing Jia; Qi Wang
International Journal of Nanomanufacturing (IJNM), Vol. 18, No. 1, 2022
Abstract: In order to verify the galvanometer scanning and obtain more accurate scanning effect. According to the scanning trajectory of x-y two-dimensional (2D) galvanometer scanning adopts theoretical analysis and matrix laboratory (Matlab) software simulations, and then discusses the correction method of the scanning distortion graph. The coordinate transformation and software correction is proposed. A result which shows software correction can make up for coordinate transformation with higher measurement accuracy.
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