A strip-line circulator/isolator module based on MEMS technology
by Junfeng Sun; Shuiping Liu; Shixing Jia; Keqiang Qian; Dongxue Luo
International Journal of Nanomanufacturing (IJNM), Vol. 18, No. 3/4, 2023

Abstract: The traditional strip-line circulator/isolator module is realised by mechanical processing, which is large size and difficult to be installed with micro-assembly process. The miniaturised strip-line circulator/isolator module is realised by the micro-electro-mechanical systems (MEMS) bulk silicon process and the micro-assembly process. Measured within frequency range of 10~18 GHz, the insertion loss between ANT and T_x is less than 0.9 dB, even it can reach 0.4 dB when the return loss is less than -15 dB. The insertion loss between ANT and R_x is mostly less than 1.1 dB except in the frequency band where the return loss seriously deteriorates. It not only has smaller size (about 8 mm * 9 mm * 2.5 mm) to be easily installed with micro-assembly process and can replace the widely used microstrip circulator/isolator module in situ, but also has electromagnetic and magnetostatic shielding advantages.

Online publication date: Wed, 07-Feb-2024

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