Nanostructured MOEMS for spectral control of light
by S. Boutami, M. Garrigues, J-L. Leclercq, X. Letartre, P. Viktorovitch
International Journal of Materials and Product Technology (IJMPT), Vol. 34, No. 4, 2009

Abstract: We present the recent evolution of electrically actuable MOEMS interferometric devices based on a deformable stack of Indium Phosphide membranes from a simple one- dimensional (1D) vertical structure towards a new class of MOEMS devices (PC-MOEMS) combining horizontal two-dimensional (2D) photonic crystals and the 1D vertical multilayer stack. First we describe latest achievements for the conventional 1D approach with a record breaking selectivity achieved for a tunable band pass filter by using refractive confinement in the resonant cavity. Then we give some basic principles underlying the so-called 2.5D Micro-nano-photonics approach. A recent demonstration of a PC-MOEMS tunable filter is presented.

Online publication date: Wed, 06-May-2009

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