Structural-property relationship of nanocrystalline diamond films and its applications
by Humberto Gomez, Ashok Kumar, Sathyaharish Jeedigunta
International Journal of Nanomanufacturing (IJNM), Vol. 4, No. 1/2/3/4, 2009

Abstract: The importance and interest of diamond synthesis is based on the unique properties that can be achieved using this material in several applications. Micro and nanocrystalline diamond (NCD) films were deposited by microwave plasma enhanced chemical vapour deposition (MPECVD). The structural properties were characterised by SEM, TEM, Raman spectroscopy and NEXAFS. Nitrogen incorporated NCD films were grown to produce electrically conductive films. Ohmic contacts to n-NCD films were formed by Ti/Au or Cr/Au metal electrodes. NCD based vibrating MEMS cantilever devices have been fabricated.

Online publication date: Mon, 07-Sep-2009

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