Nanomanufacturing of carbon nanotubes on titanium nitride
by Hyun Jin In, Hyung Woo Lee, Sang-Gook Kim, George Barbastathis
International Journal of Nanomanufacturing (IJNM), Vol. 6, No. 1/2/3/4, 2010

Abstract: Carbon nanotubes (CNTs), in particular the vertically-aligned variety grown through a PECVD-based process, are highly versatile nanostructures that can be used in a variety of nanomanufacturing applications. However, process and material compatibility issues have prevented the nanotubes from becoming more fully integrated into various micro- and nanomanufacturing applications. In this paper, we discuss the use of a folding titanium nitride membrane layer to more easily combine the nanotube growth process with other nanomanufacturing schemes, such as Nanostructured Origami^TM (In et al., 2006).

Online publication date: Sun, 22-Aug-2010

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