Material aspects for the diamond machining of submicron optical structures for UV-application
by Ekkard Brinksmeier, Oltmann Riemer, Ralf Glabe, Axel Meier
International Journal of Nanomanufacturing (IJNM), Vol. 7, No. 1, 2011

Abstract: The paper discusses material aspects governing the diamond machining process for submicron structures which serve as diffractive optical elements (DOE). Therefore, first the cutting process for fabrication of DOEs is introduced. The microstructured surface is generated by diamond turning using a nano Fast Tool Servo (nFTS), which enables a variation of the depth of cut up to 350 nm at a maximum frequency of 10 kHz. Such DOEs are typically used with a wavelength of 632 nm. A new application for UV-radiation with a wavelength below 350 nm requires alternative materials with sufficient reflectivity. Cutting experiments and UV-reflectivity tests were performed in order to identify suitable materials. High machining accuracy and UV-reflectivity were achieved with ultrafine grained aluminium as workpiece material.

Online publication date: Sat, 28-Feb-2015

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