Short pulse laser micro/nano manufacturing: fundamentals and applications Online publication date: Sat, 28-Feb-2015
by Lan Jiang, Xin Li, Xi-Peng Zhang, Qiang-Hua Chen, Hai-Lung Tsai, Yong-Feng Lu
International Journal of Nanomanufacturing (IJNM), Vol. 7, No. 2, 2011
Abstract: Lasers, especially femtosecond lasers, open wide-range and exciting new possibilities in micro/nanomanufacturing of metals, polymers, semiconductors, ultrahard materials, transparent materials, and tissues. This paper reviews the fundamentals, applications and challenges of laser micro/nano manufacturing, including ultrashort laser materials interaction, laser direct-writing manufacturing, laser interference manufacturing, laser near-field manufacturing, laser manufacturing of nanoparticles and nanotubes, and laser assisted diamond crystals growth.
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