Scattered light sensor for chatter mark detection in nanometer scale
by J. Seewig; M. Wendel
International Journal of Nanomanufacturing (IJNM), Vol. 8, No. 5/6, 2012

Abstract: The detection and analysis of chatter marks in nanometer scale, using an angle resolved scattered light sensor, is discussed in this paper. After explaining the fundamental principles of scattered light sensors, a transfer function is obtained which yields the limit of wavelength that can be detected. Afterwards two methods of detecting chatter marks are highlighted: the Gabor transform and the usage of a filter bank.

Online publication date: Thu, 21-Aug-2014

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