Quantitative characterisation of nanoimprinted structures using metrological large range AFM and CDAFM
by Gaoliang Dai; Hans-Ulrich Danzebrink; Jens Fluegge; Harald Bosse
International Journal of Nanomanufacturing (IJNM), Vol. 8, No. 5/6, 2012

Abstract: Nanoimprint lithography (NIL) is a promising method for low-cost, high throughput patterning of nanoscale devices and systems. Quantitative characterisation of nanoimprinted structures is of high importance not only to ensure the quality of the structures but also to monitor/control the manufacturing processes. In this paper, two atomic force microscopes (AFMs) are presented which are applicable for the related measurement purpose. One is a metrological large range AFM (met. LR-AFM) with a measurement volume of (25 × 25 × 5) mm³. The other instrument is a critical dimension AFM (CDAFM) with a specially developed vector approach probing (VAP) strategy for 3D measurements of nanostructures. The met. LR-AFM had assisted in diagnosing the quality issues of NIL manufacturing processes. Furthermore, the calibration of two nanoscale standards fabricated by NIL is presented, taking into account influences of defects and stitching errors. Other parameters of the nanoimprinted structures like e.g. CD, corner rounding, sidewall slope as well as line edge roughness were quantitatively determined.

Online publication date: Thu, 21-Aug-2014

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanomanufacturing (IJNM):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com