Design analysis and fabrication of a piezoelectric valveless diffuser micropump for microfluidics
by Yishu Hao; Meng Zhang; Guoqing Tang
International Journal of Mechatronics and Manufacturing Systems (IJMMS), Vol. 7, No. 1, 2014

Abstract: Previous experiments have shown that the inlet choking phenomenon was the major reason to make the one-side actuating micropump valve-free, with a flow rate of 0.088 mL/s and a pump head of 45.6 Pa. This research proposes a piezoelectric (PZT) valveless micropump which adopts an integrated diffuser bulge-piece design. The pump mainly consists of a stainless-steel structured chamber with the dimensions of 8 mm in diameter and 70 µm. By adding the stainless-steel structured chamber, the performance can be improved to 1.2 mL/s and 5.3 kPa with the driving voltage of 160 V and frequency ranging from 100 to 550 Hz. Its unique features enable it to perform more accurately and reliably in the fields of biochemical engineering and electronics cooling.

Online publication date: Thu, 24-Jul-2014

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