Physical and mechanical properties of Ti/Al multilayer heat releasing coatings
by Jindřich Musil; Petr Stupka; Šárka Zuzjaková; Radomír Čerstvý
International Journal of Nanomanufacturing (IJNM), Vol. 11, No. 1/2, 2015

Abstract: The paper reports on physical and mechanical properties of sputtered Ti/Al multilayer coatings with a bilayer thickness Λ ranging from 2 to 172 nm releasing heat during annealing. The temperature T_hr at which the heat is released during reaction between Al and Ti atoms is investigated. It was found that: 1) T_hr: a) decreases from ∼420 to 390°C for the coatings with Λ decreasing from 172 to 17 nm; b) ranges from ∼480 to ∼600°C for the coatings with Λ ≤ 12 nm; 2) the heat ΔH_Ti/Al evolved in the reaction increases from 5 to 35 kJ/mol with increasing Λ. Besides, it is shown that: 1) the heat can be released also during one pulse of the rapid thermal annealing up to 600°C with heating rate 100°C/s; 2) the released heat results in a strong interaction of the Ti/Al multilayer coating with Si substrate. The mechanical properties of the as-deposited Ti/Al multilayer coatings are also given.

Online publication date: Thu, 09-Jul-2015

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanomanufacturing (IJNM):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com