Title: Effect of FAP characteristics on fixed abrasive polishing of CaF₂ crystal

Authors: Jun Li; Yongkai Tang; Longlong Song; Yongwei Zhu; Dunwen Zuo

Addresses: Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Nanjing, 210016, China ' Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Nanjing, 210016, China ' Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Nanjing, 210016, China ' Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Nanjing, 210016, China ' Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Nanjing, 210016, China

Abstract: Pad is an important factor, which bears pressure to mechanically remove material in chemical mechanical polishing process. Owing to the abrasives fixed in pad, fixed abrasive pad (FAP) becomes more important and influences material removal and surface quality of wafer. The characteristics of FAP, abrasive type, particle size and matrix hardness, were analysed and the effect on material removal rate (MRR) and surface quality was investigated in fixed abrasive polishing of CaF₂ crystal. The results indicated that FAP with 3-5 μm diamond abrasive and soft matrix is suited to polish CaF₂ crystal. And the better surface quality with surface roughness Sa 7.27 nm and material removal rate 192 nm/min, can be achieved in fixed abrasive polishing of CaF₂ crystal.

Keywords: fixed abrasive polishing; fixed abrasive pad; FAP; CaF₂ crystal; matrix hardness; FAP characteristics.

DOI: 10.1504/IJNM.2019.100460

International Journal of Nanomanufacturing, 2019 Vol.15 No.3, pp.259 - 268

Received: 30 Aug 2016
Accepted: 30 Sep 2017
Published online: 29 Jun 2019 *

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