Article: Nanoscale displacement measurement Journal: International Journal of Nanotechnology (IJNT) 2019 Vol.16 No.6/7/8/9/10 pp.316 - 321 Abstract: Research in the field of nanotechnology requires high accuracy and reliability of the obtained results, i.e., an appropriate metrological support of instruments and equipment is needed, which is used in the measurement of linear dimensions, movements, speeds and accelerations of nano-objects. These high-precision systems and instruments need special methods and means of verification/calibration. For measuring linear displacements in the nano-range, non-destructive optical methods of laser interferometry and phasemetery are most promising, providing high sensitivity ~ 10<SUP align="right"><SMALL>-9</SMALL></SUP> m to the object displacement, high locality, absolute calibration character of measurements in portions of the laser wavelength, and the ability to automate the obtaining and processing of measuring information. In this work, a study of actuator characteristics depending on the applied voltage is considered. The developed 'interferometerphase meter' measuring system allows online investigating of complex piezoceramic structures used in various devices as actuators and the study of object characteristics under the different influences: pulsed and harmonic forms of applied voltage. Inderscience Publishers - linking academia, business and industry through research

Title: Nanoscale displacement measurement

Authors: S.A. Darznek; M.T. Gabdullin; D.G. Batryshev; Ye. Yerlanuly; N.E. Akhanova

Addresses: JSC "NICPV", Novatorov St. 40, 119421, Moscow, Russia ' JSC "KBTU", Tole bi St. 59, 050000, Almaty, Kazakhstan ' JSC "KBTU", Tole bi St. 59, 050000, Almaty, Kazakhstan; Al-Farabi KazNU, al-Farabi St. 71, 050040, Almaty, Kazakhstan ' JSC "KBTU", Tole bi St. 59, 050000, Almaty, Kazakhstan; Al-Farabi KazNU, al-Farabi St. 71, 050040, Almaty, Kazakhstan ' JSC "KBTU", Tole bi St. 59, 050000, Almaty, Kazakhstan

Abstract: Research in the field of nanotechnology requires high accuracy and reliability of the obtained results, i.e., an appropriate metrological support of instruments and equipment is needed, which is used in the measurement of linear dimensions, movements, speeds and accelerations of nano-objects. These high-precision systems and instruments need special methods and means of verification/calibration. For measuring linear displacements in the nano-range, non-destructive optical methods of laser interferometry and phasemetery are most promising, providing high sensitivity ~ 10^-9 m to the object displacement, high locality, absolute calibration character of measurements in portions of the laser wavelength, and the ability to automate the obtaining and processing of measuring information. In this work, a study of actuator characteristics depending on the applied voltage is considered. The developed 'interferometerphase meter' measuring system allows online investigating of complex piezoceramic structures used in various devices as actuators and the study of object characteristics under the different influences: pulsed and harmonic forms of applied voltage.

Keywords: laser; linear displacement; nanoscale; interferometry; PSA; phase shift angle; actuator; amplitude-frequency characteristic.

DOI: 10.1504/IJNT.2019.106607

International Journal of Nanotechnology, 2019 Vol.16 No.6/7/8/9/10, pp.316 - 321

Published online: 15 Apr 2020 *

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Title: Nanoscale displacement measurement

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