Title: A strip-line circulator/isolator module based on MEMS technology

Authors: Junfeng Sun; Shuiping Liu; Shixing Jia; Keqiang Qian; Dongxue Luo

Addresses: Nanjing Electronic Devices Institute, Nanjing, 210016, China ' Nanjing Electronic Devices Institute, Nanjing, 210016, China ' Nanjing Electronic Devices Institute, Nanjing, 210016, China ' Nanjing Electronic Devices Institute, Nanjing, 210016, China ' Nanjing Electronic Devices Institute, Nanjing, 210016, China

Abstract: The traditional strip-line circulator/isolator module is realised by mechanical processing, which is large size and difficult to be installed with micro-assembly process. The miniaturised strip-line circulator/isolator module is realised by the micro-electro-mechanical systems (MEMS) bulk silicon process and the micro-assembly process. Measured within frequency range of 10~18 GHz, the insertion loss between ANT and Tx is less than 0.9 dB, even it can reach 0.4 dB when the return loss is less than -15 dB. The insertion loss between ANT and Rx is mostly less than 1.1 dB except in the frequency band where the return loss seriously deteriorates. It not only has smaller size (about 8 mm * 9 mm * 2.5 mm) to be easily installed with micro-assembly process and can replace the widely used microstrip circulator/isolator module in situ, but also has electromagnetic and magnetostatic shielding advantages.

Keywords: strip-line; circulator; isolator; module; micro-electro-mechanical system; MEMS.

DOI: 10.1504/IJNM.2023.136566

International Journal of Nanomanufacturing, 2023 Vol.18 No.3/4, pp.120 - 129

Received: 16 Mar 2023
Accepted: 18 Mar 2023
Published online: 07 Feb 2024 *

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