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Title: Study on the effect of self-heating effect of bulk acoustic wave filter on the interpolation loss in the band

Authors: Bin Ruan; Tingting Liu; Shaohua Yang; Qinwen Huang; Ming Wu; Weiheng Shao

Addresses: School of Information Engineering, Southwest University of Science and Technology, No. 59, Qinglong Road, Sichuan Province, Mianyang, 621010, China ' School of Information Engineering, Southwest University of Science and Technology, No. 59, Qinglong Road, Sichuan Province, Mianyang, 621010, China ' Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, China Electronic Product Reliability, and Environmental Testing Research Institute, Guangdong Province, Guangzhou, 510610, China ' Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, China Electronic Product Reliability, and Environmental Testing Research Institute, Guangdong Province, Guangzhou, 510610, China ' Pandhus Microsystem Co., Ltd., Room 301, Building 3, Innovation Centre Phase 2, Science and Technology Business Park, Mianyang, Sichuan, China ' Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory, China Electronic Product Reliability, and Environmental Testing Research Institute, Guangdong Province, Guangzhou, 510610, China

Abstract: The self-heating effect occurs when the bulk acoustic wave filter is loaded with power, leading to the deterioration of the insertion loss. In this paper, the self-heating effect of bulk acoustic wave filters at high frequency power is investigated. A test system is built to obtain the maximum surface temperature and the insertion loss of the bulk acoustic wave filter at different power levels. The test results show that the self-heating effect causes the internal temperature of the bulk acoustic wave filter to increase further after increasing the power, resulting in the increase of the insertion loss. The test system and analysis method in this paper verify the relationship between the self-heating effect and the insertion loss, and can provide guidance for the construction of the relevant reliability test system of the bulk acoustic wave filter.

Keywords: bulk acoustic wave filter; self-heating effect; insertion loss.

DOI: 10.1504/IJNM.2023.136571

International Journal of Nanomanufacturing, 2023 Vol.18 No.3/4, pp.178 - 188

Received: 22 Mar 2023
Accepted: 30 Jun 2023
Published online: 07 Feb 2024 *