Title: Motion simulation of a flexible microrobot actuated by acoustic waves

Authors: Bendong Liu; Shaohua Zhang; Meimei Qiao; Jiahui Yang

Addresses: Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing, 100124, China ' Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing, 100124, China ' Faculty of Materials and Manufacturing, Beijing University of Technology, Beijing, 100124, China ' Electrical and Mechanical College, Beijing Vocational College of Agriculture, Beijing, 102208, China

Abstract: In this paper, a flexible microrobot actuated by acoustic wave is proposed. The microrobot has two flexible sharp tails, the flexible sharp tails oscillate actuated with an external acoustic field and thus generates acoustically streaming to drive the microrobot. By adjusting the actuated frequency of acoustic waves, the motion direction of the microrobot can be regulated. The simulation model of the microrobot is established with software of COMSOL Multiphysics 6.0, the characteristic modes of the microrobot are analysed and its reference actuated frequency are obtained. In addition, the acoustic actuated microrobot simulation model is established to analyse the relationship between the acoustic wave actuated frequency and the harmonic displacement and normal acceleration of the microrobot. Taking the reference actuated frequency as the datum frequency, the acoustic actuated frequencies of the left turning, the right turning and the approximate linear motion modes of the microrobot are optimally obtained.

Keywords: microrobot; acoustic actuated; flexible; characteristic frequency; acoustic-structure coupling.

DOI: 10.1504/IJNM.2023.136578

International Journal of Nanomanufacturing, 2023 Vol.18 No.3/4, pp.200 - 212

Received: 10 Feb 2023
Accepted: 16 Mar 2023
Published online: 07 Feb 2024 *

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