Title: Surface finishing of new type RS-SiC ceramics

Authors: Y. Dai

Addresses: Key Laboratory of Fibre Optic Sensing Technology and Information Processing, Wuhan University of Technology, Wuhan, Hubei, China

Abstract: The bending strength of a new type Reaction Sintered Silicon Carbide (RS-SiC) is about two times that of other SiC ceramics. In this research, the surface finishing of three types of SiC ceramics, RS-SiC, Pressure less Sintered Silicon Carbide (PS-SiC) and Chemical Vapour Deposition Silicon Carbide (CVD-SiC), were performed with Electrolytic In-process Dressing (ELID) mirror grinding technique. The grinding force and micro-hardness were investigated for the new type RS-SiC. It was found that the micro-hardness of the near-surface layer could increase by more than 80% under special finishing conditions. The mechanism of the |near-surface hardening| phenomenon was discussed. In addition, a lightweight RS-SiC mirror with 250 mm in diameter was finished by ELID technique and as a result the surface roughness reached 1.5 nm Root Mean Square (RMS).

Keywords: electrolytic in-process dressing; grinding force; mirror grinding; near-surface hardening; reaction sintered silicon carbide; surface finishing; chemical vapour deposition; CVD; micro-hardness.

DOI: 10.1504/IJCAT.2007.015251

International Journal of Computer Applications in Technology, 2007 Vol.29 No.2/3/4, pp.145 - 149

Published online: 30 Sep 2007 *

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