Title: Nano-structural and surface characteristics of non-stoichiometric In₂O_3−x thin films

Authors: G. Kiriakidis, M. Suchea, S. Christoulakis, K. Moschovis, T. Kitsopoulos, J. Stoemenos

Addresses: Institute of Electronic Structure and Laser, Foundation for Research & Technology Hellas, P.O. Box 1527 Vasilika Vouton, 71110 Heraklion, Crete, Greece; Physics Department, University of Crete, 71110 Heraklion, Crete, Greece. ' Institute of Electronic Structure and Laser, Foundation for Research & Technology Hellas, P.O. Box 1527 Vasilika Vouton, 71110 Heraklion, Crete, Greece; Chemistry Department, University of Crete, 71110 Heraklion, Crete, Greece. ' Physics Department, University of Crete, 71110 Heraklion, Crete, Greece. ' Institute of Electronic Structure and Laser, Foundation for Research & Technology Hellas, P.O. Box 1527 Vasilika Vouton, 71110 Heraklion, Crete, Greece; Physics Department, University of Crete, 71110 Heraklion, Crete, Greece. ' Institute of Electronic Structure and Laser, Foundation for Research & Technology Hellas, P.O. Box 1527 Vasilika Vouton, 71110 Heraklion, Crete, Greece; Chemistry Department, University of Crete, 71110 Heraklion, Crete, Greece. ' Physics Department, Aristotelian University of Thessaloniki, Greece

Abstract: In this work we present recent results on non-stoichiometric In₂O_3−x thin films grown by dc magnetron sputtering technique focusing on structural and surface characterisation using cross-section transmission electron microscopy (XTEM), Atomic force Microscopy (AFM) and X-ray diffraction (XRD). The films were amorphous in the early stage of growth becoming crystalline after a critical thickness. Material structure and composition are extremely important factors for the design of high efficiency gas sensors. The control of such structural parameters as grain size, texturing, porosity and grain shape through a single growth parameter (thickness) for such nanostructured films are critical for the improvement of their gas sensitivity.

Keywords: thin films; indium oxide; dc magnetron sputtering; XTEM; AFM; sensing; nanotechnology; Greece; grain size; texturing; porosity; grain shape; nanostructured films; nanostructures.

DOI: 10.1504/IJNT.2009.021717

International Journal of Nanotechnology, 2009 Vol.6 No.1/2, pp.208 - 218

Published online: 30 Nov 2008 *

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