Title: Structural-property relationship of nanocrystalline diamond films and its applications

Authors: Humberto Gomez, Ashok Kumar, Sathyaharish Jeedigunta

Addresses: Department of Mechanical Engineering, University of South Florida, 4202 E. Fowler Ave ENB 118, Tampa FL 33620, USA. ' Department of Mechanical Engineering, University of South Florida, 4202 E. Fowler Ave ENB 118, Tampa FL 33620, USA. ' Department of Electrical Engineering, University of South Florida, 4202 E. Fowler Ave ENB 118, Tampa FL 33620, USA

Abstract: The importance and interest of diamond synthesis is based on the unique properties that can be achieved using this material in several applications. Micro and nanocrystalline diamond (NCD) films were deposited by microwave plasma enhanced chemical vapour deposition (MPECVD). The structural properties were characterised by SEM, TEM, Raman spectroscopy and NEXAFS. Nitrogen incorporated NCD films were grown to produce electrically conductive films. Ohmic contacts to n-NCD films were formed by Ti/Au or Cr/Au metal electrodes. NCD based vibrating MEMS cantilever devices have been fabricated.

Keywords: nanocrystalline diamond; NCD; diamond; thin films; chemical vapour deposition; CVD; nanotechnology; microwave plasma; electrically conductive films; vibrating MEMS devices; vibrating cantilever devices; microelectromechanical systems.

DOI: 10.1504/IJNM.2009.028140

International Journal of Nanomanufacturing, 2009 Vol.4 No.1/2/3/4, pp.317 - 325

Published online: 07 Sep 2009 *

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