Title: Thin film Indium Tin Oxide acetone sensor

Authors: H.J. Pandya

Addresses: Department of Electronics and Communication Engineering, Invertis Institute of Engineering and Technology, Invertis Village, Bareilly-Lucknow Highway – 24, Bareilly 243 123, UP, India

Abstract: Indium Tin Oxide (ITO) thin films have been grown on glass substrates using a direct evaporation method. After deposition, two gold pads were added on the top to make electrical contact to the sensing film. The operating temperature of the sensor was optimised at 673 K and exposed to acetone vapour in air (200-1000 ppm). Furthermore, the response of the film with an added catalytic layer was investigated. It was observed that the catalytic layer increased the sensitivity (S) from 0.8 to 0.9 as calculated from the formula S = (Rair – Rgas)/Rgas. Also, the selectivity of thin film sensors to acetone vapour was 0.9 when compared with 0.6, 0.5 and 0.4 for methanol, butanol and ethanol vapour, respectively.

Keywords: semiconductor gas sensors; acetone; catalytic layer; VOC; volatile organic compounds; indium tin oxide; ITO thin films.

DOI: 10.1504/IJSISE.2009.029331

International Journal of Signal and Imaging Systems Engineering, 2009 Vol.2 No.1/2, pp.66 - 69

Received: 17 Jul 2008
Accepted: 25 Feb 2009
Published online: 19 Nov 2009 *

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