Title: Tribological characterisation of magnetron sputtered Ti(C, O, N) thin films

Authors: C. Olteanu, D. Munteanu, C. Ionescu, A. Munteanu, J.M. Chappe, L. Cunha, F. Vaz

Addresses: Department of Technological Equipment and Materials Science, Transilvania University of Brasov, 29 Eroilor Blvd., 500036 Brasov, Romania. ' Department of Technological Equipment and Materials Science, Transilvania University of Brasov, 29 Eroilor Blvd., 500036 Brasov, Romania. ' Department of Technological Equipment and Materials Science, Transilvania University of Brasov, 29 Eroilor Blvd., 500036 Brasov, Romania. ' Department of Technological Equipment and Materials Science, Transilvania University of Brasov, 29 Eroilor Blvd., 500036 Brasov, Romania. ' Departamento de Fisica, Universidade do Minho, Campus de Azurem, 4810-058 Guimaraes, Portugal. ' Departamento de Fisica, Universidade do Minho, Campus de Azurem, 4810-058 Guimaraes, Portugal. ' Departamento de Fisica, Universidade do Minho, Campus de Azurem, 4810-058 Guimaraes, Portugal

Abstract: Ti(C, O, N) thin films were prepared by magnetron sputtering and analysed in terms of their tribological properties. Surface and tribological parameters were analysed and discussed as a function of the films composition and structural features, as well as their thickness. The evolution of friction coefficient values was in concordance with the wear behaviour of the films. According to the atomic composition of the films, an increasing of the carbon percentage and a compound chemical formula closed to the stoichiometric TiC lead to a very good wear behaviour. This aspect is also directly correlated with the friction behaviour.

Keywords: thin films; wear behaviour; friction; roughness; composition; tribology; magnetron sputtering.

DOI: 10.1504/IJMPT.2010.034270

International Journal of Materials and Product Technology, 2010 Vol.39 No.1/2, pp.186 - 194

Published online: 31 Jul 2010 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article