Title: Nanomanufacturing of carbon nanotubes on titanium nitride

Authors: Hyun Jin In, Hyung Woo Lee, Sang-Gook Kim, George Barbastathis

Addresses: Department of Mechanical Engineering, MIT, 77 Massachusetts Avenue, Cambridge, MA 02139-4307, USA. ' Department of Mechanical Engineering, MIT, 77 Massachusetts Avenue, Cambridge, MA 02139-4307, USA. ' Department of Mechanical Engineering, MIT, 77 Massachusetts Avenue, Cambridge, MA 02139-4307, USA. ' Department of Mechanical Engineering, MIT, 77 Massachusetts Avenue, Cambridge, MA 02139-4307, USA

Abstract: Carbon nanotubes (CNTs), in particular the vertically-aligned variety grown through a PECVD-based process, are highly versatile nanostructures that can be used in a variety of nanomanufacturing applications. However, process and material compatibility issues have prevented the nanotubes from becoming more fully integrated into various micro- and nanomanufacturing applications. In this paper, we discuss the use of a folding titanium nitride membrane layer to more easily combine the nanotube growth process with other nanomanufacturing schemes, such as Nanostructured Origami^TM (In et al., 2006).

Keywords: nanomanufacturing; carbon nanotubes; CNTs; microfabrication; MEMS; nanotube integration; nanotechnology; microelectromechanical systems; titanium nitride; PECVD; nanostructures.

DOI: 10.1504/IJNM.2010.034771

International Journal of Nanomanufacturing, 2010 Vol.6 No.1/2/3/4, pp.46 - 54

Published online: 22 Aug 2010 *

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