Title: Surface modification of stainless steel by simultaneous deposition and incorporation of Si using an excimer laser

Authors: Koji Sugioka, Hideo Tashiro, Koichi Toyoda

Addresses: Riken, The Institute of Physical and Chemical Research, Wako, Saitama, 351-01, Japan. ' Riken, The Institute of Physical and Chemical Research, Wako, Saitama, 351-01, Japan. ' Riken, The Institute of Physical and Chemical Research, Wako, Saitama, 351-01, Japan

Abstract: Surface modification of stainless steel (SUS) 304 by irradiation with a KrF excimer laser in SiH₄ gas ambient is described. The incorporation and deposition of Si in SUS304 occur simultaneously by the process. The resulting continuous distribution of Si atoms across the surface layer is a pronounced feature of the process to achieve a high adhesion strength of the deposited Si films as compared with the conventional deposition process. Variation of the surface hardness, corrosion, and surface color are examined for different numbers of laser pulses and the laser fluences. The observed increases of hardness and the improvement of anti-corrosion properties are due to the new specific process for surface modification as referred to laser implant-deposition (LID).

Keywords: laser implant deposition; surface modification; KrF excimer laser; silicon doping; silicon deposition; stainless steel; surface hardness; anti-corrosion; surface colouring; corrosion resistance.

DOI: 10.1504/IJMPT.1993.036542

International Journal of Materials and Product Technology, 1993 Vol.8 No.2/3/4, pp.316 - 324

Published online: 04 Nov 2010 *

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