Title: Design and cooperation control analysis of a coarse-fine dual stage drive positioning system

Authors: Bai Xiaolong; Fang Fei; Lei Yong; Bing-Feng Ju

Addresses: The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China. ' The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China. ' The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China. ' The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China

Abstract: The coarse-fine dual stage drive mode has been widely applied in high precision positioning systems with long stroke. This paper describes a dual stage positioning system driven by a linear motor and a piezoelectric actuator. The mechanical design and cooperation control strategy of the two stages are considered. The prevailing cooperation control strategy is based on the concept that the fine stage dynamically compensates the position error of the coarse stage, which causes considerable large positioning error band in nanomanufacturing. To cope with this problem, we propose a new cooperation control strategy based on the model prediction, which includes the step signal compensation mode and ramp signal compensation mode. According to the theoretical analysis, simulation and experiment, the new cooperation control strategy can suppress the positioning error band effectively. In addition, an optimal error band reduction method is developed for the step signal compensation mode.

Keywords: coarse-fine dual stage; cooperation control strategy; error band; precision positioning; drive positioning; linear motors; piezoelectric actuators; mechanical design; nanomanufacturing; nanotechnology; model prediction; step signal compensation; ramp signal compensation.

DOI: 10.1504/IJNM.2011.042472

International Journal of Nanomanufacturing, 2011 Vol.7 No.3/4, pp.232 - 244

Received: 15 Nov 2010
Accepted: 25 Mar 2011
Published online: 07 Mar 2015 *

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