Title: Film bulk acoustic resonator nanosensors for multi-task sensing

Authors: J.K. Luo; G.M. Ashley; L. Garcia-Gancedo; P.B. Kirby; A.J. Flewitt; W.I. Milne

Addresses: IMRI, University of Bolton, Bolton BL3 5AB, UK; Department of Info. Sci. and Electron. Eng., Zhejiang University, 38 Zheda Road, Hangzhou, Zhejiang, 310027, China. ' IMRI, University of Bolton, Bolton BL3 5AB, UK. ' Electrical Eng. Department, University of Cambridge, 9 JJ Thompson Avenue, Cambridge CB3 0FA, UK. ' Microsystems and Nanotechnol. Centre, University of Cranfield, Cranfield, Bedfordshire MK43 0AL, UK. ' Electrical Eng. Department, University of Cambridge, 9 JJ Thompson Avenue, Cambridge CB3 0FA, UK. ' Electrical Eng. Department, University of Cambridge, UK 9 JJ Thompson Avenue, Cambridge CB3 0FA, UK; Department of Info. and Display, Kyung Hee University, Seoul 130701, South Korea

Abstract: This paper shows that film bulk acoustic resonator (FBAR) arrays can be very useful sensors either to detect physical parameters such as temperature and pressure directly or to detect bio-chemicals with extremely high sensitivities by incorporating a chemisorption layer or bio-probe molecules. Furthermore, it also shows that surface acoustic wave devices can be integrated with a FBAR sensor array on the same piezoelectric substrate as the microfluidics systems to perform transportation and mixing of biosamples etc. demonstrating the possibility to fabricate integrated lab-on-a-chip detection systems, in which all the actuators and sensors are operated by acoustic wave devices. This makes the detection system simple, low cost and easy to operate and hence has great commercial potential.

Keywords: film bulk acoustic resonators; FBAR arrays; multiple sensors; lab-on-a-chip; SAW microfluidics; surface acoustic wave; biochemicals; biochemical detection.

DOI: 10.1504/IJNM.2011.043685

International Journal of Nanomanufacturing, 2011 Vol.7 No.5/6, pp.448 - 462

Received: 18 Nov 2010
Accepted: 11 Mar 2011
Published online: 07 Mar 2015 *

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