Title: A study of characterisation of surface generation in ultra-precision polishing using power spectrum analysis

Authors: L.T. Ho; C.F. Cheung

Addresses: GH040, Partner SKL of Ultraprecision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong. ' GH040, Partner SKL of Ultraprecision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong

Abstract: This paper aims to characterise the surface generation in ultra-precision polishing using power spectrum analysis. The surface characteristics of mechanical polished surfaces and fluid jet polished surfaces are extracted, decomposed and analysed by power spectrum analysis of their surface roughness profiles. It is found that the surface roughness in both mechanical polishing and fluid jet polishing is mainly composed of low frequency components. With the aid of power spectrum analysis, it is also observed that the capability of machine signature removal and surface structure modification of fluid jet polishing are less effective than in mechanical polishing.

Keywords: ultra-precision polishing; precision surface measurement; surface characterisation; power spectrum analysis; surface generation; surface roughness; suface quality; mechanical polishing; fluid jet polishing; polished surfaces.

DOI: 10.1504/IJNM.2012.044661

International Journal of Nanomanufacturing, 2012 Vol.8 No.1/2, pp.140 - 160

Published online: 21 Aug 2014 *

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