Title: Nano fabrication by laser interference

Authors: Changsi Peng; Chunlei Tan; Wei Zhang; Xiaoyong Gu; Weiping Liu

Addresses: Institute of Information Optical Engineering, Soochow University, No. 1 Shizi Street, Suzhou 215006, China; Optoelestronics Research Centre, Tampere University of Technology, Korkeakoulunkatu 3, 33720 Tampere, Finland. ' Optoelestronics Research Centre, Tampere University of Technology, Korkeakoulunkatu 3, 33720 Tampere, Finland. ' Institute of Information Optical Engineering, Soochow University, No. 1 Shizi Street, Suzhou 215006, China. ' Institute of Information Optical Engineering, Soochow University, No. 1 Shizi Street, Suzhou 215006, China. ' Institute of Information Optical Engineering, Soochow University, No. 1 Shizi Street, Suzhou 215006, China

Abstract: Both high costs and low efficiency throughput discourage industrial end-users from expanding their nanotechnology-related activities with the conventional techniques such as ion beam lithography, electron beam lithography and scanning probe lithography. Laser interference lithography (LIL) will play a key role in realising the full potential of interference nano-lithography. In fabrication of nano structures, LIL technology shows great advantage of high resolution, and low cost and high efficiency compared with other beam technologies. Slight differences of incidence angles may introduce an extraordinary, controllable modulation on a uniform interference pattern. High intensity enhancement and sub-wavelength focusing were achieved simultaneously. Periodic arrays of holes in GaAs, covered with SiO₂ bubbles, were directly written into the sample within only some minutes for the whole nano-processing. The diameters of the smallest holes were less than 30 nm. The smallest modification features of the GaAs were less than 5 nm.

Keywords: laser interference lithography; LIL; interference nanolithography; photonics crystals; nanomanufacturing; nanotechnology; nanofabrication.

DOI: 10.1504/IJNM.2012.047022

International Journal of Nanomanufacturing, 2012 Vol.8 No.3, pp.212 - 220

Received: 18 Oct 2011
Accepted: 01 Dec 2011
Published online: 21 Aug 2014 *

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