Title: Scattered light sensor for chatter mark detection in nanometer scale

Authors: J. Seewig; M. Wendel

Addresses: Institute for Measurement and Sensor-Technology, Technical University of Kaiserslautern, Postbox 3049, 67653 Kaiserslautern, Germany ' Institute for Measurement and Sensor-Technology, Technical University of Kaiserslautern, Postbox 3049, 67653 Kaiserslautern, Germany

Abstract: The detection and analysis of chatter marks in nanometer scale, using an angle resolved scattered light sensor, is discussed in this paper. After explaining the fundamental principles of scattered light sensors, a transfer function is obtained which yields the limit of wavelength that can be detected. Afterwards two methods of detecting chatter marks are highlighted: the Gabor transform and the usage of a filter bank.

Keywords: scattered light sensors; chatter marks; nanotechnology; transfer function; Gabor transform; filter banks; vibration.

DOI: 10.1504/IJNM.2012.051106

International Journal of Nanomanufacturing, 2012 Vol.8 No.5/6, pp.484 - 492

Received: 20 Dec 2011
Accepted: 19 Jul 2012
Published online: 21 Aug 2014 *

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