Title: Towards fast AFM-based nanometrology and nanomanufacturing

Authors: Georg Schitter; Juergen Steininger; Friedjof C.A. Heuck; Urs Staufer

Addresses: Vienna University of Technology, Automation and Control Institute (ACIN), Gusshausstrasse 27-29, A-1040 Vienna, Austria ' Vienna University of Technology, Automation and Control Institute (ACIN), Gusshausstrasse 27-29, A-1040 Vienna, Austria ' Robert Bosch GmbH, Corporate Sector Research and Advance Engineering, Robert Bosch Platz 1, D-70839, Gerlingen-Schillerhoehe, Germany ' Department for Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628-CD Delft, The Netherlands

Abstract: Application of atomic force microscopes (AFMs) in production processes for nanometrology and nanomanufacturing is still hampered by the slow operation speed, by the low level of automation, and by insufficient control over production parameters for material deposition. This contribution discusses some recent development to improve the speed of AFMs by means of mechatronic system integration to improve the scanning speed and the bandwidth for controlling the probe-sample interaction, as well as advances from MEMS to functionalise AFM-probes for selective measurements and dip-pen nanolithography. The improved performance and functionality of the resulting prototype AFMs will enable better use of AFM technology in nanomanufacturing.

Keywords: nanometrology; nanomanufacturing; atomic force microscopy; AFM; nanolithography; nanotechnology; mechatronics integration; scanning speed; bandwidth; probe-sample interaction; MEMS; microelectromechanical systems.

DOI: 10.1504/IJNM.2012.051109

International Journal of Nanomanufacturing, 2012 Vol.8 No.5/6, pp.392 - 418

Received: 22 Feb 2012
Accepted: 28 Jul 2012
Published online: 21 Aug 2014 *

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