Title: Plastic residual strains under femtosecond laser microexplosion initiated high pressure inside quartz

Authors: Yanshen Wang; Guanghua Fan; Shiliang Qu; Shen Dong

Addresses: Department of Mechanical Engineering, School of Naval Architecture, Harbin Institute of Technology at Weihai, Weihai, 264209, China ' Department of Optoelectronic Science, Harbin Institute of Technology at Weihai, Weihai, 264209, China ' Department of Optoelectronic Science, Harbin Institute of Technology at Weihai, Weihai, 264209, China ' Center for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, China

Abstract: Femtosecond laser microexplosion can take high pressure to materials, which facilitates strain investigation in laboratory. In this paper, nanoindentation was utilised to measure plastic residual strains around femtosecond laser microexploded zone. Optical waveguides was microexploded by femtosecond laser pulses just below the back sub-surface of a quartz wafer. Nanomechanical properties of the surface area that just are above the optical waveguides were measured. Load dependent changes in hardness can be found from nanoindentation experiments. Using the formula correlating residual strains with hardness values measured by nanoindentation, plastic residual strains in the surrounding area of femtosecond laser microexploded optical waveguide was acquired. The variations in plastic residual strains facilitated the investigation of refractive index changes in the area about femtosecond microexploded zone.

Keywords: nanoindentation; plastic residual strain; femtosecond lasers; microexplosion; quartz wafers; nanotechnology; hardness; optical waveguides.

DOI: 10.1504/IJNM.2013.052872

International Journal of Nanomanufacturing, 2013 Vol.9 No.1, pp.10 - 18

Received: 24 Feb 2012
Accepted: 26 Jun 2012
Published online: 31 Mar 2014 *

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