Title: The microstructure of multi-layer nc-Ca films on different substrates

Authors: Wen-Jin Zhang; De-Wen Meng; Yu-Feng Peng

Addresses: College of Physics and Information Engineering, Henan Normal University, Henan Xinxiang 453007, China ' College of Physics and Information Engineering, Henan Normal University, Henan Xinxiang 453007, China ' College of Physics and Information Engineering, Henan Normal University, Henan Xinxiang 453007, China

Abstract: Multi-layer nanocrystalline Ca (nc-Ca) films were prepared by vacuum evaporation method, using three different materials as the substrate, namely CaF₂(111), Si(100), and Si(111). The films can be stored in the air for a long time, and there was no obvious shedding phenomenon at room temperature. Nc-ca thin films on different substrates were characterised by XRD analysis, showed (111) preferred orientation. On CaF₂(111), Si(100) and Si(111) substrates, the average grain size of calcium are 36.8 nm, 43.9 nm and 45.2 nm, respectively. By SEM analysis, there was a better surface morphology of the films on the CaF₂(111) substrate.

Keywords: vacuum evaporation; preferred orientation; nanocrystalline Ca thin films; microstructure; multi-layer thin films; substrates; calcium; grain size; surface morphology; nanotechnology.

DOI: 10.1504/IJNM.2013.056048

International Journal of Nanomanufacturing, 2013 Vol.9 No.3/4, pp.238 - 244

Received: 11 Oct 2012
Accepted: 08 Jan 2013
Published online: 31 Mar 2014 *

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