Title: Performance of micro PCD drills in drilling into SiC and effects of ultrasonic vibration

Authors: Osamu Ohnishi; Toshiro Doi; Syuhei Kurokawa; Kazuo Takahashi; Fusao Fujita; Hiroshi Mizue; Yukihito Kido

Addresses: University of Miyazaki, 1-1 Gakuen Kibanadai-nishi, Miyazaki 889-2192, Japan ' Kyushu University, 6-1 Kasuga-kouen, Kasuga, Fukuoka 816-8580, Japan ' Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan ' Mitsui Engineering and Shipbuilding Co., Ltd., 1-1-18 Suehiromachi, Oita 870-0027, Japan ' ADMAP Inc., 3-16-2 Tamahara, Tamano, Okayama 706-0014, Japan ' Oita Industrial Research Institute, 1-4361-10 Takaenishi, Oita 870-1117, Japan ' The Oita Prefectural Organization for Industry Creation, 1-4361-10 Takaenishi, Oita 870-1117, Japan

Abstract: The present paper deals with the micro drilling into silicon carbide (SiC) with micro polycrystalline diamond (PCD) drills. Micro PCD drills with a nominal diameter of 300 µm were fabricated by wire electrodischarge machining and they were used to drill into SiC test pieces with or without ultrasonic vibration. In the drilling test, performance of drilling into SiC was investigated. As the result of the drilling test, it was possible to make holes with good shape under all conditions. Large feed condition led to large chipping around hole entrance, bad surface roughness of hole wall and a shortened tool life. On the other hand, effects of ultrasonic vibration on chipping, surface roughness of hole wall, chip form and tool life were unclear, but the surface appearance of holes drilled with ultrasonic vibration did not seem to be affected so much by increase of feed.

Keywords: polycrystalline diamond drills; micro drilling; silicon carbide; SiC; ultrasonic vibration; hole quality; tool life; micromachining; wire EDM; electro-discharge machining; electrical discharge machining; chipping; surface roughness; surface quality; hole wall; chip form; tool life; feed rate.

DOI: 10.1504/IJNM.2014.059007

International Journal of Nanomanufacturing, 2014 Vol.10 No.1/2, pp.175 - 184

Received: 03 Nov 2012
Accepted: 14 Mar 2013
Published online: 17 May 2014 *

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