Title: Study on ringing artefacts of carbon nanotube probes of atomic force microscopy

Authors: Xiaodong Xing; Zongwei Xu; Haifeng Gao; Fengzhou Fang; Bing Liu

Addresses: State Key Laboratory of Precision Measuring Technology and Instrument, Centre of MicroNano Manufacturing Technology, Tianjin University, 92# Weijin Road, Nankai District, Tianjin, China ' State Key Laboratory of Precision Measuring Technology and Instrument, Centre of MicroNano Manufacturing Technology, Tianjin University, 92# Weijin Road, Nankai District, Tianjin, China ' State Key Laboratory of Precision Measuring Technology and Instrument, Centre of MicroNano Manufacturing Technology, Tianjin University, 92# Weijin Road, Nankai District, Tianjin, China ' State Key Laboratory of Precision Measuring Technology and Instrument, Centre of MicroNano Manufacturing Technology, Tianjin University, 92# Weijin Road, Nankai District, Tianjin, China ' State Key Laboratory of Precision Measuring Technology and Instrument, Centre of MicroNano Manufacturing Technology, Tianjin University, 92# Weijin Road, Nankai District, Tianjin, China

Abstract: CNTs have been regarded as ideal AFM tips for their outstanding advantages, but due to their high aspect ratio, ringing artefacts often occur when they detect steep samples. Experimental results paired with a mathematical model are used to capture the true sample morphology when such ring artefacts are observed. The scan direction was found to have a prominent influence on the artefacts' consistency and cycle, and the distance of the gaps between the lowest points of the artefacts and the trench obeys a certain rule. By establishing mathematical model, formulae were given to calculate the gaps. Finally, the theoretic morphology can be acquired, and it is in good agreement with the no-artefact images.

Keywords: nanomanufacturing; CNT probes; ringing artifacts; atomic force microscopy; AFM; scan direction; adhesion gap; critical adhesion curve; CA curve; carbon nanotubes; nanotechnology; mathematical modelling.

DOI: 10.1504/IJNM.2014.060792

International Journal of Nanomanufacturing, 2014 Vol.10 No.3, pp.215 - 228

Received: 07 Mar 2013
Accepted: 20 May 2013
Published online: 17 May 2014 *

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