Article: Synthesis and characterisations of sol-gel-derived LaNiO3 thin-film electrodes on Si substrates Journal: International Journal of Nanotechnology (IJNT) 2015 Vol.12 No.5/6/7 pp.496 - 504 Abstract: We present the fabrication and characterisation of conductive LaNiO3 (LNO) thin films, deposited on different substrates including Si(100), SiO2/Si(100) and Pt/Ti/SiO2/Si(100) by the sol-gel spin-coating technique. Deposition parameters, such as the sol concentration and annealing temperature as well as the number of coating layers, were optimised to obtain the desired film quality. X-ray diffraction analysis showed that crystalline and highly (110) oriented LNO thin films were obtained after annealing at 750C. Scanning electron microscopy images revealed that LNO films show a dense and smooth surface. Moreover, the crystallites' size increased with increasing film thickness, which resulted in the enhancement of electrical conductivity. The well-controlled crystallinity and low resistivity of 3.73 10-4Ω.cm, measured on a film thickness of 200 nm, indicate that LNO thin films can be used as the template and electrode for the fabrication of integrated piezoelectric thin-films on Si substrates. Inderscience Publishers - linking academia, business and industry through research

Title: Synthesis and characterisations of sol-gel-derived LaNiO₃ thin-film electrodes on Si substrates

Authors: Vu Thu Hien; Nguyen Duc Minh; Vu Ngoc Hung

Addresses: International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No. 1, Dai Co Viet, Hanoi, Vietnam ' International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No. 1, Dai Co Viet, Hanoi, Vietnam ' International Training Institute for Materials Science (ITIMS), Hanoi University of Science and Technology, No. 1, Dai Co Viet, Hanoi, Vietnam

Abstract: We present the fabrication and characterisation of conductive LaNiO₃ (LNO) thin films, deposited on different substrates including Si(100), SiO₂/Si(100) and Pt/Ti/SiO₂/Si(100) by the sol-gel spin-coating technique. Deposition parameters, such as the sol concentration and annealing temperature as well as the number of coating layers, were optimised to obtain the desired film quality. X-ray diffraction analysis showed that crystalline and highly (110) oriented LNO thin films were obtained after annealing at 750C. Scanning electron microscopy images revealed that LNO films show a dense and smooth surface. Moreover, the crystallites' size increased with increasing film thickness, which resulted in the enhancement of electrical conductivity. The well-controlled crystallinity and low resistivity of 3.73 10^-4Ω.cm, measured on a film thickness of 200 nm, indicate that LNO thin films can be used as the template and electrode for the fabrication of integrated piezoelectric thin-films on Si substrates.

Keywords: pervoskite LaNiO3; LNO thin films; lanthanum nickel oxide; conductive electrodes; crystalline orientation; sol-gel spin coating; thin film electrodes; silicon substrates; film thickness; electrical conductivity; integrated piezoelectric thin films.

DOI: 10.1504/IJNT.2015.067907

International Journal of Nanotechnology, 2015 Vol.12 No.5/6/7, pp.496 - 504

Published online: 08 Mar 2015 *

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Title: Synthesis and characterisations of sol-gel-derived LaNiO3 thin-film electrodes on Si substrates

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Title: Synthesis and characterisations of sol-gel-derived LaNiO₃ thin-film electrodes on Si substrates