Title: Ultra-precision cutting of linear micro-groove array for distributed feedback laser devices

Authors: Bing Guo; Xin Yu; Zhaoqi Zeng; Qingliang Zhao; Lei Xu; Xiaoliang Liu

Addresses: Center of Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, P.O. Box 413, Harbin 150001, China; Institute of Opto-Electronics, School of Astraunutics, Harbin Institute of Technology, Harbin 150080, China ' Institute of Opto-Electronics, School of Astraunutics, Harbin Institute of Technology, Harbin 150080, China ' Beijing Institute of Control Engineering, 100091, Beijing, China ' Center of Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China ' Beijing Spacecrafts, Beijing 100094, China ' Center of Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China

Abstract: The tunable range and beam linewidth of distributed feedback laser were determined by fabrication quality of the periodic linear micro-groove array on substrate, which grooves are high sloped and ranged sub-micron to few microns. Compared with the common micro-groove arrays (size from tens of microns to sub-millimetre), the ultra-precision cutting of these tiny and high-sloped linear micro-groove arrays are more difficult to realise. In this paper, a series of investigations was proposed for ultra-precision cutting of linear micro-groove array on polymethyl methacrylate (PMMA). Firstly, the different cutting processes included planing and fly-cutting were conducted. The workpiece morphology, surface quality and machining efficiency of these processes were investigated. Then, the fly cutting process was optimised by the calculation of non-free chip zone and the analysis of chip interference by cutting experiments. Finally, a novel tool positioning method based on acoustic emission was presented in order to realise high accuracy control of micro-groove arrays dimensions.

Keywords: linear micro-groove array; fly-cutting; planing; polymer; chip flow; tool positioning.

DOI: 10.1504/IJNM.2018.089176

International Journal of Nanomanufacturing, 2018 Vol.14 No.1, pp.9 - 22

Received: 09 Mar 2016
Accepted: 03 Nov 2016
Published online: 09 Jan 2018 *

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