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Influence of rake angle and nose radius on optical silicon nanomachining feed rate and surface quality: a modelling, prediction and optimisation study
Lukman N. Abdulkadir; Khaled Abou-El-Hossein; Muhammad M. Liman
International Journal of Nanomanufacturing (IJNM), 2021 Vol.17 No.1, pp.47 - 75
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