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New technology MO PVD-arc multi-layer producing plasma atmosphere of Al(CH3)3 precursor
Marek Betiuk, Kryspin Burdynski, Aleksander Nakonieczny, Andrzej Przywoski, Marek Szudrowicz, Hartmut Baum
International Journal of Microstructure and Materials Properties (IJMMP), 2007 Vol.2 No.1, pp.84 - 89
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