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Fabrication and performances of TaN@(Al/CuO) thin film
Xiao-Ming Ren; Ke-Xin Yu; Jing-Xin Zhang; Lan Liu; Wei Liu; Rui-zhen Xie; Wei Ren
International Journal of Nanomanufacturing (IJNM), 2023 Vol.18 No.2, pp.39 - 45
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