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A novel ultra-thin and high toughness piezoelectric thin film sensor based on MEMS technology
Yingqi Shang; Hongquan Zhang; Weiwei Liu; Xiaofeng Zhao; Dongsa Chen; Zuofei Wu; Chunpeng Ai
International Journal of Nanomanufacturing (IJNM), 2023 Vol.18 No.3/4, pp.171 - 177
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