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Investigation of the dimensional variation of microstructures through the µMIM process
G. Fu, S.G. Li, I. Reading, P. Chaturvedi, S.B. Tor, S.F. Yoon, K. Youcef-Toumi
International Journal of Nanomanufacturing (IJNM), 2007 Vol.1 No.6, pp.722 - 735
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