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Physico-chemical properties of SiOXNY thin films
R. Mahamdi, L. Saci, F. Mansour, C. Molliet, P. Temple-Boyer, E. Scheid
International Journal of Nano and Biomaterials (IJNBM), 2009 Vol.2 No.1/2/3/4/5, pp.347 - 353
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