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Numerically controlled sacrificial plasma oxidation using array-type electrode toward high-throughput deterministic machining
Yasuhisa Sano; Keinosuke Yoshinaga; Shohei Kamisaka; Hidekazu Mimura; Satoshi Matsuyama; Kazuto Yamauchi
International Journal of Nanomanufacturing (IJNM), 2011 Vol.7 No.3/4, pp.289 - 297
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