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Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors
L. García-Gancedo; G.M. Ashley; X.B. Zhao; J. Pedrós; A.J. Flewitt; W.I. Milne; J.K. Luo; J.R. Lu; C.J.B. Ford; D. Zhang
International Journal of Nanomanufacturing (IJNM), 2011 Vol.7 No.3/4, pp.371 - 382
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