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Monte Carlo study of the high temperature hydrogen cleaning process of 6H-silicon carbide for subsequent growth of nano scale metal oxide films
Ghulam Moeen Uddin; Katherine S. Ziemer; Bing Sun; Abe Zeid; Sagar Kamarthi
International Journal of Nanomanufacturing (IJNM), 2013 Vol.9 No.5/6, pp.407 - 430
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