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Article Title

Effects of fluorine implantation on polysilicon with high-k Er₂O₃ dielectrics

Authors

Chyuan Haur Kao; Hsuan Chi Fan; Chien Jung Liao; Shih Nan Cheng

Journal

International Journal of Nanotechnology (IJNT), 2014 Vol.11 No.12, pp.1110 - 1118

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