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Kink effect for 28 nm n-channel field-effect transistors after decoupled plasma nitridation treatment with annealing temperatures
Shea-Jue Wang; Mu-Chun Wang; Win-Der Lee; Wen-Sheng Chen; Heng-Sheng Huang; Shuang-Yuan Chen; L.S. Huang; Chuan-Hsi Liu
International Journal of Nanotechnology (IJNT), 2015 Vol.12 No.1/2, pp.59 - 73
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