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Doping profile optimisation in bulk FinFET channel and source/drain extension regions for low off-state leakage
Keke Zhang; Yunfei Liu; Huilong Zhu; Chao Zhao; Tianchun Ye; Haizhou Yin
International Journal of Nanotechnology (IJNT), 2015 Vol.12 No.1/2, pp.111 - 125
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