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Yield improvement via minimisation of step height non-uniformity in chemical mechanical planarisation (CMP) with pressure and velocity as control variables
Muthukkumar S. Kadavasal, Abhijit Chandra, Sutee Eamkajornsiri, Ashraf -F. Bastawros
International Journal of Manufacturing Technology and Management (IJMTM), 2005 Vol.7 No.5/6, pp.467 - 489
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